THE EFFECT OF DEPOSITION TIME OF He-CH4 TO SURFACE ROUGHNESS ON AISI 410 STEEL SURFACE

ABSTRACT: Penelitian ini bertujuan untuk mengetahui pengaruh waktu pendeposisian He-CH4 (helium-metana) pada permukaan baja AISI 410 terhadap angka kekasaran permukaan. Proses pendeposisian He-CH4 dapat dilakukan dengan plasma chemical vapor deposition (plasma CVD). Campuran gas He-CH4 dideposisikan di permukaan baja AISI 410 menggunakan temperatur 300 °C dan tekanan 2 mbar. Variasi waktu pendeposisian yaitu 1, 2, 3, 4, dan 5 jam. Perbandingan campuran gas He-CH4 adalah 76% He dan24% CH4. Pengujian angka kekasaran permukaan menggunakan instrumen pengukur kekasaran permukaan Surfcom 120A. Berdasarkan hasil pengujian angka kekasaran permukaan didapatkan bahwa terjadi peningkatan angka kekasaran permukaan diawal pendeposisian. Angka kekasaran raw materialsebesar 0,04 μm meningkat menjadi 0,1 μm setelah 2 jam pendeposisian. Penambahan waktupendeposisian setelah melewati 4 jam menurunkan angka kekasaran menjadi 0,05 μm. Penambahan waktu pendeposisian menyebabkan permukaan lapisan menjadi halus dan rata.

Keywords: Angka kekasaran permukaan, Waktu pendeposisian, He-CH4, Baja AISI 410

Author: Wahyu Anhar, Viktor Malau, Tjipto Sujitno

Journal Code: jptmesingg160009

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